MOSIS PARAMETRIC TEST RESULTS RUN: N96G VENDOR: TSMC TECHNOLOGY: SCN035H FEATURE SIZE: 0.35 microns INTRODUCTION: This report contains the lot average results obtained by MOSIS from measurements of MOSIS test structures on each wafer of this fabrication lot. SPICE parameters obtained from similar measurements on a selected wafer are also attached. COMMENTS: SMSCN3ME04_TSM TRANSISTOR PARAMETERS W/L N-CHANNEL P-CHANNEL UNITS MINIMUM 0.6/0.4 Vth 0.57 -0.76 Volts SHORT 20/0.4 Idss 471 -214 uA/um Vth 0.61 -0.76 Volts Vpt 9.2 -10.0 Volts WIDE 20/0.4 Ids0 0.6 -0.1 pA/um LARGE 50/50 Vth 0.55 -0.74 Volts Vjbkd 8.7 -8.6 Volts Ijlk -37.4 1.8 pA Gamma 0.63 0.33 V^0.5 K' (Uo*Cox/2) 79.2 -29.2 uA/V^2 COMMENTS: Poly bias varies with design technology. To account for mask and etch bias use the appropriate value for the parameter XL in your SPICE model card. Design Technology XL ----------------- ------- SCN3M_SUBM (lambda=0.20) -0.02 thick oxide -0.06 TSMC35 0.03 thick oxide 0.04 SCN3M (lambda=0.25) -0.12 thick oxide -0.06 FOX TRANSISTORS GATE N+ACTIVE P+ACTIVE UNITS Vth Poly >15.0 <-15.0 Volts PROCESS PARAMETERS N+ACTV P+ACTV POLY POLY2 MTL1 MTL2 MTL3 UNITS Sheet Resistance 80.0 151.9 7.9 50.9 0.08 0.07 0.04 ohms/sq Width Variation 0.04 0.05 0.04 -0.22 0.15 0.02 0.04 microns (measured - drawn) Contact Resistance 64.9 125.5 6.3 33.7 1.36 2.61 ohms Gate Oxide Thickness 77 angstrom PROCESS PARAMETERS N_WELL N\PLY UNITS Sheet Resistance 1014 1074 ohms/sq Width Variation microns (measured - drawn) Contact Resistance ohms COMMENTS: N\POLY is N-well under polysilicon. CAPACITANCE PARAMETERS N+ACTV P+ACTV MTL1 MTL2 MTL3 POLY POLY2 N_WELL UNITS Area (substrate) 880 1383 22 13 7 109 51 aF/um^2 Area (N+active) 35 17 12 4503 aF/um^2 Area (P+active) 4526 aF/um^2 Area (poly) 48 15 9 864 aF/um^2 Area (poly2) 46 aF/um^2 Area (metal1) 36 14 aF/um^2 Area (metal2) 38 aF/um^2 Fringe (substrate) 308 363 86 40 21 aF/um Fringe (poly) 62 39 29 aF/um Fringe (metal1) 57 34 aF/um Fringe (metal2) 62 aF/um Overlap (N+active) 350 aF/um Overlap (P+active) 302 aF/um CIRCUIT PARAMETERS UNITS Inverters K Vinv 1.0 1.26 Volts Vinv 1.5 1.39 Volts Vol (100 uA) 2.0 0.35 Volts Voh (100 uA) 2.0 2.82 Volts Vinv 2.0 1.49 Volts Gain 2.0 -20.00 Ring Oscillator Freq. DIV256 (31-stage,3.3V) 183.36 MHz Ring Oscillator Power DIV256 (31-stage,3.3V) 0.14 uW/MHz/g COMMENTS: SUBMICRON N96G SPICE BSIM3 VERSION 3.1 PARAMETERS SPICE 3f5 Level 8, Star-HSPICE Level 49, UTMOST Level 8 * DATE: Aug 12/99 * LOT: n96g WAF: 08 * Temperature_parameters=Default .MODEL CMOSN NMOS ( +LEVEL = 49 acm = 3 hdif = 0.5e-6 +VERSION = 3.1 TNOM = 27 TOX = 7.7E-9 +XJ = 1E-7 NCH = 2.3579E17 VTH0 = 0.5048265 +K1 = 0.5542796 K2 = 0.0155863 K3 = 2.3475646 +K3B = -3.3142916 W0 = 4.145888E-5 NLX = 1.430868E-7 +DVT0W = 0 DVT1W = 0 DVT2W = 0 +DVT0 = -0.0150839 DVT1 = 1.51022E-3 DVT2 = 0.170688 +U0 = 415.8570638 UA = 5.057324E-11 UB = 1.496793E-18 +UC = 2.986268E-11 VSAT = 1.237033E5 A0 = 0.9098788 +AGS = 0.2120181 B0 = 1.683612E-6 B1 = 5E-6 +KETA = -4.011887E-4 A1 = 0 A2 = 1 +RDSW = 1.156967E3 PRWG = -8.468558E-3 PRWB = -7.678669E-3 +WR = 1 WINT = 5.621821E-8 LINT = 1.606205E-8 +XL = -2E-8 XW = 0 DWG = -6.450939E-9 +DWB = 6.530228E-9 VOFF = -0.1259348 NFACTOR = 0.3344887 +CIT = 0 CDSC = 1.527511E-3 CDSCD = 0 +CDSCB = 0 ETA0 = 1.21138E-3 ETAB = -1.520242E-4 +DSUB = 0.1259886 PCLM = 0.8254768 PDIBLC1 = 0.4211084 +PDIBLC2 = 6.081164E-3 PDIBLCB = -5.865856E-6 DROUT = 0.7022263 +PSCBE1 = 7.238634E9 PSCBE2 = 5E-10 PVAG = 0.6261655 +DELTA = 0.01 MOBMOD = 1 PRT = 0 +UTE = -1.5 KT1 = -0.11 KT1L = 0 +KT2 = 0.022 UA1 = 4.31E-9 UB1 = -7.61E-18 +UC1 = -5.6E-11 AT = 3.3E4 WL = 0 +WLN = 1 WW = -1.22182E-15 WWN = 1.137 +WWL = 0 LL = 0 LLN = 1 +LW = 0 LWN = 1 LWL = 0 +CAPMOD = 2 XPART = 0.4 CGDO = 1.96E-10 +CGSO = 1.96E-10 CGBO = 0 CJ = 8.829973E-4 +PB = 0.7946332 MJ = 0.3539285 CJSW = 2.992362E-10 +PBSW = 0.9890846 MJSW = 0.1871372 PVTH0 = -0.0148617 +PRDSW = -114.7860236 PK2 = -5.151187E-3 WKETA = 5.687313E-3 +LKETA = -0.018518 ) * .MODEL CMOSP PMOS ( +LEVEL = 49 acm = 3 hdif = 0.5e-6 +VERSION = 3.1 TNOM = 27 TOX = 7.7E-9 +XJ = 1E-7 NCH = 8.52E16 VTH0 = -0.6897992 +K1 = 0.4134289 K2 = -5.342989E-3 K3 = 24.8361788 +K3B = -1.4390847 W0 = 2.467689E-6 NLX = 3.096223E-7 +DVT0W = 0 DVT1W = 0 DVT2W = 0 +DVT0 = 1.3209807 DVT1 = 0.4695965 DVT2 = -8.790762E-4 +U0 = 150.6275733 UA = 2.016943E-10 UB = 1.714919E-18 +UC = -1.36948E-11 VSAT = 9.559222E4 A0 = 0.9871247 +AGS = 0.3541967 B0 = 3.188091E-6 B1 = 5E-6 +KETA = -0.0169877 A1 = 0 A2 = 1 +RDSW = 2.443009E3 PRWG = 0.0260616 PRWB = 0.141561 +WR = 1 WINT = 5.038936E-8 LINT = 1.650588E-9 +XL = -2E-8 XW = 0 DWG = -1.535456E-8 +DWB = 1.256904E-8 VOFF = -0.15 NFACTOR = 1.5460516 +CIT = 0 CDSC = 1.413317E-4 CDSCD = 0 +CDSCB = 0 ETA0 = 0.3751392 ETAB = 2.343374E-3 +DSUB = 0.8877574 PCLM = 5.8638076 PDIBLC1 = 1.05224E-3 +PDIBLC2 = 3.481753E-5 PDIBLCB = 2.37525E-3 DROUT = 0.0277454 +PSCBE1 = 3.013379E10 PSCBE2 = 3.608179E-8 PVAG = 3.9564294 +DELTA = 0.01 MOBMOD = 1 PRT = 0 +UTE = -1.5 KT1 = -0.11 KT1L = 0 +KT2 = 0.022 UA1 = 4.31E-9 UB1 = -7.61E-18 +UC1 = -5.6E-11 AT = 3.3E4 WL = 0 +WLN = 1 WW = -5.22182E-16 WWN = 1.125 +WWL = 0 LL = 0 LLN = 1 +LW = 0 LWN = 1 LWL = 0 +CAPMOD = 2 XPART = 0.4 CGDO = 2.307E-10 +CGSO = 2.307E-10 CGBO = 0 CJ = 1.397645E-3 +PB = 0.99 MJ = 0.5574537 CJSW = 3.665392E-10 +PBSW = 0.99 MJSW = 0.3399328 PVTH0 = 0.0114364 +PRDSW = 52.7951169 PK2 = 9.714153E-4 WKETA = 0.0109418 +LKETA = 7.702974E-3 ) * Download Text File