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Study of Random-Dopant-Fluctuation (RDF) Effects for the Trigate Bulk MOSFET
Changhwan Shin, Xin Sun, Tsu Jae King

Citation
Changhwan Shin, Xin Sun, Tsu Jae King. "Study of Random-Dopant-Fluctuation (RDF) Effects for the Trigate Bulk MOSFET". IEEE Transactions on Electron Devices, 56(7):1538-1542, July 2009.

Abstract
A study of random-dopant-fluctuation (RDF) effects on the trigate bulk MOSFET versus the planar bulk MOSFET is performed via atomistic 3-D device simulation for devices with a 20-nm gate length. For identical nominal body and source/drain doping profiles and layout width, the trigate bulkMOSFET shows less threshold voltage (VTH) lowering and variation. RDF effects are found to be caused primarily by body RDF. The trigate bulk MOSFET offers a new method of VTH adjustment, via tuning of the retrograde body doping depth, to mitigate tradeoffs in VTH variation and short-channel effect control.

Electronic downloads

  • T-ED_published_072009.pdf · application/pdf · 548 kbytes. ("The author(s) acknowledge the support of the Center for Circuit & System Solutions (C2S2) Focus Center, one of five research centers funded under the Focus Center Research Program, a Semiconductor Research Corporation program.")

Citation formats  

  • HTML
    Changhwan Shin, Xin Sun, Tsu Jae King. <a
    href="http://bwrc.eecs.berkeley.edu/php/pubs/pubs.php/1089.html">Study
    of Random-Dopant-Fluctuation (RDF) Effects for the Trigate
    Bulk MOSFET</a>, <i>IEEE Transactions on
    Electron Devices</i>, 56(7):1538-1542, July 2009.
  • Plain text
    Changhwan Shin, Xin Sun, Tsu Jae King. "Study of
    Random-Dopant-Fluctuation (RDF) Effects for the Trigate Bulk
    MOSFET". IEEE Transactions on Electron Devices,
    56(7):1538-1542, July 2009.
  • BibTeX
    @article{ShinSunKing2009,
        author = {Changhwan Shin and Xin Sun and Tsu Jae King},
        title = {Study of Random-Dopant-Fluctuation (RDF) Effects
                  for the Trigate Bulk MOSFET},
        journal = {IEEE Transactions on Electron Devices},
        volume = {56},
        number = {7},
        pages = {1538-1542},
        month = {July},
        year = {2009},
        URL = {http:///php/pubs/pubs.php/1089.html}
    }
    

Posted by Changhwan Shin on Jun 17, 2009..

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