BWRC Publications

Citation
Liang-Teck Pang, Kun Qian, Costas Spanos, Borivoje Nikolic. "Measurement and analysis of variability in 45nm strained-Si CMOS technology". IEEE Journal of Solid-State Circuits, 44(9), September 2009.

Abstract
A test-chip in a low-power 45nm technology, featuring uniaxial strained-Si, has been built to study variability in CMOS circuits. Systematic layout-induced variation, die-to-die (D2D), wafer-to-wafer (W2W) and within-die (WID) variability has been measured over multiple wafers, analyzed and attributed to likely causes in the manufacturing process. Delay is characterized using an array of ring oscillators and transistor leakage current is measured with an on-chip ADC. The key results link systematic layout-dependent and die-to-die variability as being caused by gate patterning and material strain. In comparison to a previous 90nm experiment, gate proximity now contributes less to frequency variability, causing a 2% change in overall performance, while strain has increased its contribution to about 5% of the overall performance.

Electronic downloads

• jssc_cicc08_Berkeley_LTPang_final.pdf · application/pdf · 823 kbytes

Citation formats

• HTML

  Liang-Teck Pang, Kun Qian, Costas Spanos, Borivoje Nikolic.
  <a
  href="http://bwrc.eecs.berkeley.edu/php/pubs/pubs.php/970.html">Measurement
  and analysis of variability in 45nm strained-Si CMOS
  technology</a>, <i>IEEE Journal of Solid-State
  Circuits</i>, 44(9), September 2009.

• Plain text

  Liang-Teck Pang, Kun Qian, Costas Spanos, Borivoje Nikolic.
  "Measurement and analysis of variability in 45nm strained-Si
  CMOS technology". IEEE Journal of Solid-State
  Circuits, 44(9), September 2009.

• BibTeX

  @article{PangQianSpanosNikolic2009,
      author = {Liang-Teck Pang and Kun Qian and Costas Spanos and
                Borivoje Nikolic},
      title = {Measurement and analysis of variability in 45nm
                strained-Si CMOS technology},
      journal = {IEEE Journal of Solid-State Circuits},
      volume = {44},
      number = {9},
      month = {September},
      year = {2009},
      URL = {http:///php/pubs/pubs.php/970.html}
  }
  

Posted by Borivoje Nikolic on Apr 15, 2009..

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